Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

  1. Ferrando, N.
  2. Gosálvez, M.A.
  3. Cerdá, J.
  4. Gadea, R.
  5. Sato, K.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Year of publication: 2011

Volume: 21

Issue: 2

Type: Article

DOI: 10.1088/0960-1317/21/2/025021 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus