Local characterization of ultrathin oxides on silicon wafers by scanning tunneling microscopy

  1. Vasquez de Parga, A.L.
  2. Ocal, C.
  3. Ortega, J.E.
  4. Miranda, R.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1990

Volume: 41

Issue: 4-6

Pages: 784-786

Type: Article

DOI: 10.1016/0042-207X(90)93783-F GOOGLE SCHOLAR
Data source: Scopus