Nano-oxidation of silicon surfaces: Comparison of noncontact and contact atomic-force microscopy methods
- Tello, M.
- García, R.
ISSN: 0003-6951
Year of publication: 2001
Volume: 79
Issue: 3
Pages: 424-426
Type: Article
ISSN: 0003-6951
Year of publication: 2001
Volume: 79
Issue: 3
Pages: 424-426
Type: Article