Nano-oxidation of silicon surfaces: Comparison of noncontact and contact atomic-force microscopy methods

  1. Tello, M.
  2. García, R.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2001

Volume: 79

Issue: 3

Pages: 424-426

Type: Article

DOI: 10.1063/1.1385582 GOOGLE SCHOLAR