Giant growth rate in nano-oxidation of p-silicon surfaces by using ethyl alcohol liquid bridges

  1. Tello, M.
  2. García, R.
Revue:
Applied Physics Letters

ISSN: 0003-6951

Année de publication: 2003

Volumen: 83

Número: 12

Pages: 2339-2341

Type: Article

DOI: 10.1063/1.1613799 GOOGLE SCHOLAR