Aspect-ratio and lateral-resolution enhancement in force microscopy by attaching nanoclusters generated by an ion cluster source at the end of a silicon tip
- Martnez, L.
- Tello, M.
- Daz, M.
- Romn, E.
- Garcia, R.
- Huttel, Y.
Journal:
Review of Scientific Instruments
ISSN: 0034-6748
Year of publication: 2011
Volume: 82
Issue: 2
Type: Article