Characterization of nanoporous low dielectric constant thin films.
- Huang, QR
- Frank, CW
- Mecerreyes, D
- Miller, RD
Aldizkaria:
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
ISSN: 0065-7727
Argitalpen urtea: 2001
Alea: 221
Mota: Biltzar ekarpena