Generation of third and higher-order intermodulation products in MEMS capacitors, and their effects
- Girbau, David
- Otegi, Nerea
- Pradell, Lluis
- Lazaro, Antonio
ISBN: 88-902012-0-7
Year of publication: 2005
Pages: 593-596
Congress: 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium (GAAS 2005)
Type: Conference paper