CHARACTERIZATION OF ORIENTATION-DEPENDENT ETCHING PROPERTIES AND SURFACE MORPHOLOGY OF SAPPHIRE CRYSTAL IN WET ETCHING

  1. Xing, Yan
  2. Guo, Zhiyue
  3. Wu, Guorong
  4. Gosalvez, Miguel A.
Libro:
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

ISBN: 978-1-7281-2007-2

Año de publicación: 2019

Páginas: 281-284

Congreso: 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS)

Tipo: Aportación congreso

GOOGLE SCHOLAR
Fuente de los datos: WoS