Etch and growth rates of GaN for surface orientations in the <0001> crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton
- Guo, X.
- Gosalvez, M.A.
- Xing, Y.
- Chen, Y.
Zeitschrift:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Datum der Publikation: 2023
Ausgabe: 153
Art: Artikel