Exploring the activation energy during nanoscale structural evolution in wet etching
- Gosálvez, M.A.
- Sato, K.
Actas:
Proceedings of the 2004 International Symposium on Micro-NanoMechatronics and Human Science, MHS2004; The Fourth Symposium 'Micro-NanoMechatronics for and Information-Based Society' The 21st Century
ISBN: 0780386078
Año de publicación: 2004
Páginas: 127-132
Tipo: Aportación congreso