Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si
- Hynninen, T.
- Foster, A.S.
- Gosálvez, M.A.
- Sato, K.
- Nieminen, R.M.
ISSN: 0953-8984, 1361-648X
Argitalpen urtea: 2008
Alea: 20
Zenbakia: 48
Mota: Artikulua