A continuous cellular automaton for the atomistic simulation of evolving surface in anisotropic etching

  1. Xing, Y.
  2. Gosálvez, M.A.
  3. Sato, K.
Proceedings:
Proceedings - 4th International Conference on Natural Computation, ICNC 2008

ISBN: 9780769533049

Year of publication: 2008

Volume: 7

Pages: 402-406

Type: Conference paper

DOI: 10.1109/ICNC.2008.237 GOOGLE SCHOLAR

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