Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution

  1. Tang, B.
  2. Gosalvez, M.A.
  3. Pal, P.
  4. Itoh, S.
  5. Hida, H.
  6. Shikida, M.
  7. Sato, K.
Proceedings:
20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science

ISBN: 9781424450954

Year of publication: 2009

Pages: 48-52

Type: Conference paper

DOI: 10.1109/MHS.2009.5352098 GOOGLE SCHOLAR
Data source: Scopus