Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy

  1. Pal, P.
  2. Sato, K.
  3. Hida, H.
  4. Gosalvez, M.A.
  5. Kimura, Y.
  6. Ishibashi, K.
  7. Niwano, M.
Actas:
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

ISBN: 9781424441938

Año de publicación: 2009

Páginas: 751-754

Tipo: Aportación congreso

DOI: 10.1109/SENSOR.2009.5285602 GOOGLE SCHOLAR
Fuente de los datos: Scopus