Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching

  1. Xing, Y.
  2. Gosálvez, M.A.
  3. Sato, K.
Proceedings:
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

ISBN: 9781424441938

Year of publication: 2009

Pages: 747-750

Type: Conference paper

DOI: 10.1109/SENSOR.2009.5285587 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus