Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching
- Xing, Y.
- Gosálvez, M.A.
- Sato, K.
Konferenzberichte:
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ISBN: 9781424441938
Datum der Publikation: 2009
Seiten: 747-750
Art: Konferenz-Beitrag
