Modeling of Silicon Etching

  1. Gosálvez, M.A.
Book:
Handbook of Silicon Based MEMS Materials and Technologies: Second Edition

ISBN: 9780323299657

Year of publication: 2015

Pages: 333-353

Type: Book chapter

DOI: 10.1016/B978-0-323-29965-7.00012-9 GOOGLE SCHOLAR
Data source: Scopus