Saw-Pirani vacuum sensor with a new functioning mode and a fast response time
- Mercier, D.
- Bordel, G.
- Brunet-Manquat, P.
- Verrun, S.
- Elmazria, O.
- Sarry, F.
- Belgacem, B.
- Bounouar, J.
Proceedings:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ISBN: 9781457701573
Year of publication: 2011
Pages: 902-905
Type: Conference paper