Saw-Pirani vacuum sensor with a new functioning mode and a fast response time

  1. Mercier, D.
  2. Bordel, G.
  3. Brunet-Manquat, P.
  4. Verrun, S.
  5. Elmazria, O.
  6. Sarry, F.
  7. Belgacem, B.
  8. Bounouar, J.
Konferenzberichte:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ISBN: 9781457701573

Datum der Publikation: 2011

Seiten: 902-905

Art: Konferenz-Beitrag

DOI: 10.1109/TRANSDUCERS.2011.5969122 GOOGLE SCHOLAR
Datenquelle: Scopus