Unified modeling language description of the object-oriented multi-scale adaptive finite element method for step-and-flash imprint lithography simulations

  1. Paszyński, M.
  2. Gurgul, P.
  3. Sieniek, M.
  4. Pardo, D.
Aktak:
IOP Conference Series: Materials Science and Engineering

ISSN: 1757-899X,  1757-8981

Argitalpen urtea: 2014

Alea: 10

Zenbakia: 1

Mota: Biltzar ekarpena

DOI: 10.1088/1757-899X/10/1/012247 GOOGLE SCHOLAR
Datuen iturria: Scopus