Thin film diffusion barrier formation in PDMS microcavities

  1. Riaz, A.
  2. Gandhiraman, R.P.
  3. Dimov, I.K.
  4. Basabe-Desmonts, L.
  5. Ricco, A.J.
  6. Ducrée, J.
  7. Daniels, S.
  8. Lee, L.P.
Proceedings:
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

ISBN: 9781424441938

Year of publication: 2009

Pages: 1051-1054

Type: Conference paper

DOI: 10.1109/SENSOR.2009.5285939 GOOGLE SCHOLAR
Data source: Scopus