Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching
- Xing, Y.
- Guo, Z.
- Wu, G.
- Gosalvez, M.A.
Actes de conférence:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
ISBN: 9781728120072
Année de publication: 2019
Pages: 281-284
Type: Communication dans un congrès