Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching

  1. Xing, Y.
  2. Guo, Z.
  3. Wu, G.
  4. Gosalvez, M.A.
Proceedings:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

ISBN: 9781728120072

Year of publication: 2019

Pages: 281-284

Type: Conference paper

DOI: 10.1109/TRANSDUCERS.2019.8808344 GOOGLE SCHOLAR
Data source: Scopus