The level set simulation for complex microstructures in quartz wet etching
- Zhang, Y.
- Zhang, J.
- Xing, Y.
- Zhang, H.
- Gosalvez, M.A.
- Qiu, X.
Actes de conférence:
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
ISBN: 9781538627310
Année de publication: 2017
Pages: 1356-1359
Type: Communication dans un congrès