The level set simulation for complex microstructures in quartz wet etching

  1. Zhang, Y.
  2. Zhang, J.
  3. Xing, Y.
  4. Zhang, H.
  5. Gosalvez, M.A.
  6. Qiu, X.
Actes de conférence:
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

ISBN: 9781538627310

Année de publication: 2017

Pages: 1356-1359

Type: Communication dans un congrès

DOI: 10.1109/TRANSDUCERS.2017.7994308 GOOGLE SCHOLAR
La source de données: Scopus