The level set simulation for complex microstructures in quartz wet etching

  1. Zhang, Y.
  2. Zhang, J.
  3. Xing, Y.
  4. Zhang, H.
  5. Gosalvez, M.A.
  6. Qiu, X.
Proceedings:
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

ISBN: 9781538627310

Year of publication: 2017

Pages: 1356-1359

Type: Conference paper

DOI: 10.1109/TRANSDUCERS.2017.7994308 GOOGLE SCHOLAR
Data source: Scopus