Transient and Stable Profiles During Anisotropic Wet Etching of Quartz

  1. Xing, Y.
  2. Gosálvez, M.A.
  3. Zhang, H.
  4. Li, Y.
  5. Qiu, X.
Revue:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Année de publication: 2017

Volumen: 26

Número: 5

Pages: 1063-1072

Type: Article

DOI: 10.1109/JMEMS.2017.2707096 GOOGLE SCHOLAR
La source de données: Scopus