Transient and Stable Profiles During Anisotropic Wet Etching of Quartz

  1. Xing, Y.
  2. Gosálvez, M.A.
  3. Zhang, H.
  4. Li, Y.
  5. Qiu, X.
Aldizkaria:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Argitalpen urtea: 2017

Alea: 26

Zenbakia: 5

Orrialdeak: 1063-1072

Mota: Artikulua

DOI: 10.1109/JMEMS.2017.2707096 GOOGLE SCHOLAR
Datuen iturria: Scopus