Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching

  1. Li, Y.
  2. Gosálvez, M.A.
  3. Pal, P.
  4. Sato, K.
  5. Xing, Y.
Revue:
Journal of Micromechanics and Microengineering

ISSN: 1361-6439,  0960-1317

Année de publication: 2015

Volumen: 25

Número: 5

Type: Article

DOI: 10.1088/0960-1317/25/5/055023 GOOGLE SCHOLAR
La source de données: Scopus