Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching
- Li, Y.
- Gosálvez, M.A.
- Pal, P.
- Sato, K.
- Xing, Y.
ISSN: 1361-6439, 0960-1317
Argitalpen urtea: 2015
Alea: 25
Zenbakia: 5
Mota: Artikulua