Level set implementation for the simulation of anisotropic etching: Application to complex MEMS micromachining

  1. Montoliu, C.
  2. Ferrando, N.
  3. Gosálvez, M.A.
  4. Cerdá, J.
  5. Colom, R.J.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Year of publication: 2013

Volume: 23

Issue: 7

Type: Article

DOI: 10.1088/0960-1317/23/7/075017 GOOGLE SCHOLAR
Data source: Scopus