Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton

Li, Y.; Xing, Y.; Gosalvez, M.A.; Pal, P.; Zhou, Y.

doi:10.1109/TRANSDUCERS.2013.6626960

Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton

Li, Y.
Xing, Y.
Gosalvez, M.A.
Pal, P.
Zhou, Y.

Proceedings:

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

ISBN: 9781467359818

Year of publication: 2013

Pages: 1087-1090

Type: Conference paper

DOI: 10.1109/TRANSDUCERS.2013.6626960 GOOGLE SCHOLAR

Data source: Scopus