Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton

  1. Li, Y.
  2. Xing, Y.
  3. Gosalvez, M.A.
  4. Pal, P.
  5. Zhou, Y.
Konferenzberichte:
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

ISBN: 9781467359818

Datum der Publikation: 2013

Seiten: 1087-1090

Art: Konferenz-Beitrag

DOI: 10.1109/TRANSDUCERS.2013.6626960 GOOGLE SCHOLAR
Datenquelle: Scopus