Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

  1. Ferrando, N.
  2. Gosálvez, M.A.
  3. Colóm, R.J.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Year of publication: 2012

Volume: 22

Issue: 2

Type: Article

DOI: 10.1088/0960-1317/22/2/025021 GOOGLE SCHOLAR
Data source: Scopus