Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution

  1. Pal, P.
  2. Sato, K.
  3. Gosalvez, M.A.
  4. Tang, B.
  5. Hida, H.
  6. Shikida, M.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317 1361-6439

Year of publication: 2011

Volume: 21

Issue: 1

Type: Article

DOI: 10.1088/0960-1317/21/1/015008 GOOGLE SCHOLAR

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