Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

  1. Gosálvez, M.A.
  2. Pal, P.
  3. Ferrando, N.
  4. Sato, K.
Revue:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Année de publication: 2011

Volumen: 21

Número: 12

Type: Article

DOI: 10.1088/0960-1317/21/12/125008 GOOGLE SCHOLAR

Objectifs de Développement Durable

La source de données: Scopus