Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

  1. Gosálvez, M.A.
  2. Pal, P.
  3. Ferrando, N.
  4. Sato, K.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Year of publication: 2011

Volume: 21

Issue: 12

Type: Article

DOI: 10.1088/0960-1317/21/12/125008 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus