Axis cross-coupling reduction on a high bandwidth XY flexure stage

  1. Ruiz, A.
  2. Campa, F.J.
  3. Altuzarra, O.
  4. Petuya, V.
  5. Pinto, C.
  6. Herna´Ndez, A.
Book Series:
Mechanisms and Machine Science

ISSN: 2211-0992,  2211-0984

ISBN: 9783319158617

Year of publication: 2015

Volume: 30

Pages: 61-71

Type: Conference paper

DOI: 10.1007/978-3-319-15862-4_6 GOOGLE SCHOLAR
Data source: Scopus