Publikationen in Zusammenarbeit mit Forschern von Instituto de Instrumentación para Imagen Molecular (5)

2013

  1. Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

    Computer Physics Communications, Vol. 184, Núm. 10, pp. 2299-2309

  2. Level set implementation for the simulation of anisotropic etching: Application to complex MEMS micromachining

    Journal of Micromechanics and Microengineering, Vol. 23, Núm. 7

2012

  1. Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

    Journal of Micromechanics and Microengineering, Vol. 22, Núm. 2

2011

  1. Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

    Computer Physics Communications, Vol. 182, Núm. 3, pp. 628-640

  2. Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

    Journal of Micromechanics and Microengineering, Vol. 21, Núm. 12