Polímeros y Materiales Avanzados: Física, Química y Teconología
Département
Kobe University
Kōbe, JapónPublications en collaboration avec des chercheurs de Kobe University (2)
2015
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Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)
Journal of Micromechanics and Microengineering
2014
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Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners
Journal of Micromechanics and Microengineering, Vol. 24, Núm. 12