Publikationen in Zusammenarbeit mit Forschern von Kobe University (2)

2015

  1. Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)

    Journal of Micromechanics and Microengineering

2014

  1. Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners

    Journal of Micromechanics and Microengineering, Vol. 24, Núm. 12