FABRICATION OF SHARP TIPS WITH HIGH ASPECT RATIO BY SURFACTANT-MODIFIED WET ETCHING FOR THE AFM PROBE

  1. Tang, B.
  2. Sato, K.
  3. Tanaka, H.
  4. Gosalvez, M. A.
Büchersammlung:
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

ISSN: 1084-6999

ISBN: 978-1-4244-9634-1

Datum der Publikation: 2011

Seiten: 328-331

Kongress: 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Art: Konferenz-Beitrag

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Fuente de los datos: WoS