CHARACTERIZATION OF ORIENTATION-DEPENDENT ETCHING PROPERTIES AND SURFACE MORPHOLOGY OF SAPPHIRE CRYSTAL IN WET ETCHING
- Xing, Yan
- Guo, Zhiyue
- Wu, Guorong
- Gosalvez, Miguel A.
ISBN: 978-1-7281-2007-2
Datum der Publikation: 2019
Seiten: 281-284
Kongress: 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS)
Art: Konferenz-Beitrag