Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton

  1. Xing, Y.
  2. Gos̈alvez, M.A.
  3. Sato, K.
  4. Yi, H.
Revue:
Journal of Micromechanics and Microengineering

ISSN: 1361-6439,  0960-1317

Année de publication: 2010

Volumen: 20

Número: 1

Type: Article

DOI: 10.1088/0960-1317/20/1/015019 GOOGLE SCHOLAR

Objectifs de Développement Durable

La source de données: Scopus