Fabrication of sharp tips with high aspect ratio by surfactant-modified wet etching for the AFM probe

  1. Tang, B.
  2. Sato, K.
  3. Tanaka, H.
  4. Gosalvez, M.A.
Actes de conférence:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781424496327

Année de publication: 2011

Pages: 328-331

Type: Communication dans un congrès

DOI: 10.1109/MEMSYS.2011.5734428 GOOGLE SCHOLAR
La source de données: Scopus