Etched profile control in anisotropic etching of silicon by TMAH+Triton
- Pal, P.
- Gosálvez, M.A.
- Sato, K.
ISSN: 0960-1317, 1361-6439
Année de publication: 2012
Volumen: 22
Número: 6
Type: Article
Revue:
Journal of Micromechanics and Microengineering