A genetic algorithm based Kinetic Monte Carlo simulation for the evolution of complex surface in anisotropic wet etching
- Xing, Y.
- Gosalvez, M.A.
- Tian, M.
- Sato, K.
Actes de conférence:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ISBN: 9781457701573
Année de publication: 2011
Pages: 374-377
Type: Communication dans un congrès
