A genetic algorithm based Kinetic Monte Carlo simulation for the evolution of complex surface in anisotropic wet etching
- Xing, Y.
- Gosalvez, M.A.
- Tian, M.
- Sato, K.
Konferenzberichte:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ISBN: 9781457701573
Datum der Publikation: 2011
Seiten: 374-377
Art: Konferenz-Beitrag